Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10629446 | Substrate treatment method and substrate treatment apparatus | Hiroyuki Takahashi | 2020-04-21 |
| 10622205 | Substrate processing method and substrate processing apparatus | Hiroyuki Takahashi, Tomoaki OGIWARA, Takuya Abe, Jiro Katsuki | 2020-04-14 |