Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818532 | Substrate processing apparatus | Kouki Murakami, Hirozumi Hoshino | 2020-10-27 |
| 10770283 | Substrate aligning method, substrate receiving method, substrate liquid processing method, substrate aligning apparatus, substrate receiving apparatus, substrate liquid processing apparatus, and substrate processing system | Hirozumi Hoshino | 2020-09-08 |