Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10720356 | Substrate processing apparatus and method of transferring substrate | Yoshiaki Sasaki | 2020-07-21 |
| 10569310 | Method for cleaning substrate transfer mechanism and substrate processing system | — | 2020-02-25 |