KS

Kazusige Sano

TL Tokyo Electron Limited: 1 patents #306 of 858Top 40%
Overall (2020): #395,560 of 565,922Top 70%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10840081 Liquid processing apparatus, liquid processing method, and storage medium Takumi Honda, Hironobu Hyakutake 2020-11-17