Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10689762 | Substrate processing apparatus, substrate processing method and recording medium | Akira Murata, Satoshi Kaneko, Kazunori Sakamoto | 2020-06-23 |
| 10584420 | Substrate liquid processing apparatus, substrate liquid processing method and recording medium | Satoshi Kaneko, Kazunori Sakamoto | 2020-03-10 |