Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879066 | Mask pattern forming method, fine pattern forming method, and film deposition apparatus | Shigeru Nakajima, Jun Ogawa, Hiroki Murakami | 2020-12-29 |
| 10822714 | Method of growing crystal in recess and processing apparatus used therefor | Yoichiro CHIBA, Daisuke Suzuki | 2020-11-03 |