KK

Katsuhiko Komori

TL Tokyo Electron Limited: 1 patents #306 of 858Top 40%
Overall (2020): #397,387 of 565,922Top 75%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10570508 Film forming apparatus, film forming method and heat insulating member Satoshi Takagi, Mitsuhiro Okada, Masahisa Watanabe, Kazuya Takahashi, Kazuki Yano +1 more 2020-02-25