Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811266 | Substrate liquid processing apparatus and method, and computer-readable storage medium storing substrate liquid processing program | Fumihiro Kamimura | 2020-10-20 |
| 10607849 | Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium storing substrate liquid processing program | Hideaki Sato, Takashi Nagai | 2020-03-31 |