HS

Hidetaka Shinohara

TL Tokyo Electron Limited: 1 patents #306 of 858Top 40%
Overall (2020): #448,418 of 565,922Top 80%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10553421 Substrate processing apparatus, substrate processing method and storage medium Seiki Ishida, Shogo Fukui 2020-02-04