Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825660 | Electrostatic chuck and plasma processing apparatus | Shin Yamaguchi | 2020-11-03 |
| 10818480 | Method of operating electrostatic chuck of plasma processing apparatus | Shin Yamaguchi | 2020-10-27 |
| 10796889 | Processing apparatus for target object and inspection method for processing apparatus | Akira Ishikawa, Atsushi Matsuura, Shin Yamaguchi | 2020-10-06 |
| 10787950 | Heat insulating pipe system and processing system | Kohei Otsuki | 2020-09-29 |
| 10665432 | Temperature control method | Shin Yamaguchi | 2020-05-26 |