Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10580655 | Plasma etching method for selectively etching silicon oxide with respect to silicon nitride | Hikaru Watanabe | 2020-03-03 |
| 10553442 | Etching method | — | 2020-02-04 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10580655 | Plasma etching method for selectively etching silicon oxide with respect to silicon nitride | Hikaru Watanabe | 2020-03-03 |
| 10553442 | Etching method | — | 2020-02-04 |