AT

Akihiro Tsuji

TL Tokyo Electron Limited: 2 patents #149 of 858Top 20%
📍 Rifu, JP: #73 of 313 inventorsTop 25%
Overall (2020): #196,539 of 565,922Top 35%
2
Patents 2020

Issued Patents 2020

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10580655 Plasma etching method for selectively etching silicon oxide with respect to silicon nitride Hikaru Watanabe 2020-03-03
10553442 Etching method 2020-02-04