Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879100 | Substrate transfer device, substrate transfer method and recording medium | Tokutarou Hayashi, Hiroki Harada, Tooru Tokimatu, Masahiro Abe, Kazutoshi Ishimaru | 2020-12-29 |