Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811326 | Acoustic detection of laser failure mode in semiconductor environment | Michael Garbe | 2020-10-20 |
| 10707089 | Dry etch process landing on metal oxide etch stop layer over metal layer and structure formed thereby | Michael Hans Enzelberger-Heim, Reiner Port | 2020-07-07 |
| 10593552 | Method for doping semiconductor substrates by means of a co-diffusion process and doped semiconductor substrate produced by means of said method | Philip Rothhardt, Andreas Wolf, Daniel Biro, Sabrina Lohmüller | 2020-03-17 |