HS

Heikki Saari

TO Teknologian Tutkimuskeskus Vtt Oy: 1 patents #2 of 64Top 4%
Overall (2020): #452,061 of 565,922Top 80%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10732041 Microelectromechanical (MEMS) fabry-perot interferometer, apparatus and method for manufacturing fabry-perot interferometer Bin Guo, Anna Rissanen 2020-08-04