Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10566227 | Controlling method for a wafer transportation part and a load port part on an EFEM | Hidetoshi Horibe | 2020-02-18 |
TO
Tsutomu Okabe
Overall (2020): #237,505 of 565,922Top 45%
1
Patents 2020