Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10550464 | Physical vapor deposition method using backside gas cooling of workpieces | Harish V. PENMETHSA, Harshal T. Vasa, Srikanth Dasaradhi, Lee LaBlanc | 2020-02-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10550464 | Physical vapor deposition method using backside gas cooling of workpieces | Harish V. PENMETHSA, Harshal T. Vasa, Srikanth Dasaradhi, Lee LaBlanc | 2020-02-04 |