Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10639759 | Load state diagnosis device and load state diagnosis method for servomotor | Reiko Hattori, Takayoshi Matsuyama | 2020-05-05 |
| 10591824 | Illumination optical device, illumination method, and exposure method and device | — | 2020-03-17 |
| 10554035 | Arc detector and arc detection method | Kohei Tomita, Reiko Hattori, Takeshi Ashida | 2020-02-04 |