Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867860 | Methods of forming FinFET device | Chung-Chi Ko | 2020-12-15 |
| 10867789 | Treatment to control deposition rate | Kuang-Yuan Hsu | 2020-12-15 |
| 10804374 | Spacer structure with high plasma resistance for semiconductor devices | Chung-Chi Ko | 2020-10-13 |
| 10796898 | Treatment system and method | Kuang-Yuan Hsu, Tze-Liang Lee | 2020-10-06 |
| 10748760 | Varying temperature anneal for film and structures formed thereby | Shu Ling Liao, Chung-Chi Ko | 2020-08-18 |
| 10692773 | Forming nitrogen-containing low-K gate spacer | Chung-Chi Ko | 2020-06-23 |
| 10529553 | Treatment system and method | Kuang-Yuan Hsu, Tze-Liang Lee | 2020-01-07 |