Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879077 | Planarization apparatus and planarization method thereof | Ming-Tung Wu, Chun-Kai Lan, Hsun-Chung Kuang | 2020-12-29 |
| 10857651 | Apparatus of chemical mechanical polishing and operating method thereof | Chun-Kai Lan, Ming-Tung Wu, Sheng-Chau Chen, Hsun-Chung Kuang | 2020-12-08 |