Issued Patents 2020
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867824 | Substrate detecting system in a substrate storage container | Chi-Hung Liao | 2020-12-15 |
| 10817015 | Display device and method for operating display device | Chiung Wen TSENG, Yi-Xuan HUANG | 2020-10-27 |
| 10811300 | Wafer table with dynamic support pins | Chi-Hung Liao | 2020-10-20 |
| 10775706 | Lithography apparatus and method using the same | Chi-Hung Liao | 2020-09-15 |
| 10775700 | Lithography system and method for exposing wafer | Chi-Hung Liao | 2020-09-15 |
| 10678146 | Particle removal from wafer table and photomask | Chi-Hung Liao | 2020-06-09 |
| 10651075 | Wafer table with dynamic support pins | Chi-Hung Liao | 2020-05-12 |
| 10613444 | Semiconductor apparatus and method of operating the same | Chi-Hung Liao | 2020-04-07 |