Issued Patents 2020
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867844 | Wet cleaning with tunable metal recess for VIA plugs | Yu-Shih Wang, Shian Wei Mao, Ming-Hsi Yeh | 2020-12-15 |
| 10867803 | Semiconductor device and method | Yao-Wen Hsu, Jian-Jou Lian, Neng-Jye Yang, Chia-Wei Wu, Kuan-Lin Chen +1 more | 2020-12-15 |
| 10811320 | Footing removal in cut-metal process | Ming-Chi Huang, Ying-Liang Chuang, Ming-Hsi Yeh | 2020-10-20 |
| 10761423 | Chemical composition for tri-layer removal | Li-Min Chen, Neng-Jye Yang, Chia-Wei Wu, Jian-Jou Lian | 2020-09-01 |
| 10748898 | Metal gate structure and methods thereof | Ming-Chi Huang, Ying-Liang Chuang, Ming-Hsi Yeh | 2020-08-18 |
| 10720516 | Gate stack structure and method for forming the same | Ming-Chi Huang, Ying-Liang Chuang, Ming-Hsi Yeh | 2020-07-21 |
| 10699944 | Surface modification layer for conductive feature formation | Jian-Jou Lian, Neng-Jye Yang, Li-Min Chen | 2020-06-30 |
| 10676668 | Wet etch chemistry for selective silicon etch | Neng-Jye Yang, Ming-Hsi Yeh, Shun Wu Lin, Yu-Wen Wang, Jian-Jou Lian +1 more | 2020-06-09 |
| 10658221 | Semiconductor wafer cleaning apparatus and method for cleaning semiconductor wafer | Wang-Hua Lin, Chun-Liang Tai, Chun-Hsiang Fan, Ming-Hsi Yeh | 2020-05-19 |
| 10529572 | Semiconductor device and method of manufacture | Jian-Jou Lian, Li-Min Chen, Neng-Jye Yang, Ming-Hsi Yeh, Shun Wu Lin | 2020-01-07 |