Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854505 | Removing polymer through treatment | Che-Cheng Chang, Wen-Tung Chen, Yu-Cheng Liu, Horng-Huei Tseng | 2020-12-01 |
| 10825892 | MIM capacitor with top electrode having footing profile and method forming same | Che-Cheng Chang, Wen-Tung Chen, Yu-Cheng Liu, Horng-Huei Tseng | 2020-11-03 |
| 10679863 | Method for forming semiconductor device structure with fine line pitch and fine end-to-end space | Yu-Shu Chen, Yu-Cheng Liu | 2020-06-09 |
| 10541298 | Etching process control in forming MIM capacitor | Che-Cheng Chang, Wen-Tung Chen, Yu-Cheng Liu, Horng-Huei Tseng | 2020-01-21 |
| 10535566 | Semiconductor device and method of manufacture | Che-Cheng Chang, Horng-Huei Tseng, Wen-Tung Chen, Yu-Cheng Liu | 2020-01-14 |
| 10535727 | Etching process control in forming MIM capacitor | Che-Cheng Chang, Wen-Tung Chen, Yu-Cheng Liu, Horng-Huei Tseng | 2020-01-14 |