Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10532925 | Heater design for MEMS chamber pressure control | Shyh-Wei Cheng, Chih-Yu Wang, Hsin-Yu Chen, Ji-Hong Chiang, Jui-Chun Weng +1 more | 2020-01-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10532925 | Heater design for MEMS chamber pressure control | Shyh-Wei Cheng, Chih-Yu Wang, Hsin-Yu Chen, Ji-Hong Chiang, Jui-Chun Weng +1 more | 2020-01-14 |