Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10838305 | Lithographic mask correction using volume correction techniques | Zhiru Yu, Junjiang Lei, Yuan Fang | 2020-11-17 |
| 10671052 | Synchronized parallel tile computation for large area lithography simulation | Daniel Beylkin, Kenneth Lik Kin Ho, Sagar Vinodbhai Trivedi, Fangbo Xu, Junjiang Lei | 2020-06-02 |
| 10671786 | Method of modeling a mask by taking into account of mask pattern edge interaction | Chien-Jen Lai, Xin Zhou | 2020-06-02 |