Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867816 | Method and apparatus for wafer backside cooling | Young-Shuen Chou, I-Che Chiu, Tsung-Hao Lu, Ken Liao | 2020-12-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867816 | Method and apparatus for wafer backside cooling | Young-Shuen Chou, I-Che Chiu, Tsung-Hao Lu, Ken Liao | 2020-12-15 |