Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10864557 | System for cleaning wafer in CMP process of semiconductor manufacturing fabrication | Chia-Lin Hsueh | 2020-12-15 |
| 10576606 | Platen rotation system and method | Bruce CHO, Huang-Chu Ko | 2020-03-03 |