Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10741366 | Process chamber and wafer processing method | Chien-Kuo Huang, Shih-Wen Huang, Joung-Wei Liou, Fei-Fan Chen | 2020-08-11 |
| 10669625 | Pumping liner for chemical vapor deposition | Cheng-Hsiung Liu, Chun-Hao Hsu, Yu-Yun Peng, Chih-Yuan Yao, Keng-Chu Lin | 2020-06-02 |