AI

Akira Itakura

TL Tokyo Electron Limited: 1 patents #306 of 858Top 40%
📍 Rifu, JP: #128 of 313 inventorsTop 45%
Overall (2020): #559,456 of 565,922Top 100%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10553468 Substrate storing method and substrate processing apparatus — 2020-02-04