Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825701 | Baking device for a wafer coated with a coating containing a solvent | Aaron Foley, Oliver Treichel | 2020-11-03 |
| 10825705 | Apparatus, system, and method for handling aligned wafer pairs | Hale Johnson | 2020-11-03 |
| 10580678 | Apparatus and method for semiconductor wafer leveling, force balancing and contact sensing | Hale Johnson, Michael B. Brennen | 2020-03-03 |