Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10758945 | Liquid knife, liquid knife cleaning apparatus and liquid knife assembly apparatus | Liang-Gei Yao, Lin-Jie Huang, Wei Zhou, Giseub Lim, Erlun Chen +3 more | 2020-09-01 |
| 10551651 | Substrate support device | Min Xu, Chuang Gao, Kai-Di Wu, Jiajia Shan | 2020-02-04 |