Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10629466 | Electrostatic chuck device including a heating member | Yukio Miura | 2020-04-21 |
| 10593585 | Electrostatic chuck device including a heating member | Yukio Miura | 2020-03-17 |
| 10532879 | Dispenser and shield | Shingo Kawasaki, Yo Suzuki, Naoto Uchida | 2020-01-14 |