Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844470 | Epitaxial film forming method, sputtering apparatus, manufacturing method of semiconductor light-emitting element, semiconductor light-emitting element, and illumination device | Yoshiaki DAIGO | 2020-11-24 |
| 10600676 | Group III nitride composite substrate and method for manufacturing the same, and method for manufacturing group III nitride semiconductor device | Akihiro Hachigo, Yuki Hiromura, Naoki Matsumoto, Seiji Nakahata, Fumitake Nakanishi +6 more | 2020-03-24 |