Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10559459 | Method for producing silicon nitride film and silicon nitride film | Hiroshi Taka, Masaya Yamawaki, Shoichi Murakami | 2020-02-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10559459 | Method for producing silicon nitride film and silicon nitride film | Hiroshi Taka, Masaya Yamawaki, Shoichi Murakami | 2020-02-11 |