Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10838361 | Holographic grating lithography system and a method for adjusting the self-collimation of the interference optical path thereof | Wenlong Zou, Chaoming Li, Xinrong Chen, Zhijian Cai, Quan Liu | 2020-11-17 |