Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763074 | Charged particle beam apparatus, observation method using charged particle beam apparatus, and program | Yoshinobu Hoshino, Shigeru Kawamata | 2020-09-01 |
| 10720303 | Charged particle beam apparatus and alignment adjustment method of sample stage | Keisuke Mikami, Toshiaki Nesaki | 2020-07-21 |