Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10836962 | Etchant composition, method of etching insulating film, method of manufacturing semiconductor device, and silane compound | Cheol Woo Kim, Yu Na Shim, Kwang Kuk Lee, Young Bom Kim | 2020-11-17 |