Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10672632 | Transfer chamber | Toshihiro Kawai, Takashi Shigeta, Munekazu Komiya | 2020-06-02 |
| 10658217 | Transfer chamber | Toshihiro Kawai, Takashi Shigeta, Munekazu Komiya | 2020-05-19 |
| 10586723 | Door opening/closing system, and load port equipped with door opening/closing system | Toshihiro Kawai, Munekazu Komiya, Takashi Shigeta | 2020-03-10 |