Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854448 | Plasma generating device, plasma sputtering device, and plasma sputtering method | Kazunori Takahashi, Jun FUKUSHIMA, Akira Ando | 2020-12-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854448 | Plasma generating device, plasma sputtering device, and plasma sputtering method | Kazunori Takahashi, Jun FUKUSHIMA, Akira Ando | 2020-12-01 |