Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10845589 | Optical apparatus, machining apparatus, and article manufacturing method | Yukihiro Inoue | 2020-11-24 |
| 10663716 | Optical apparatus, processing apparatus, and article manufacturing method | — | 2020-05-26 |