Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10593573 | Electrostatic chuck and substrate fixing device | Tatsuro Yoshida | 2020-03-17 |
| 10535545 | Substrate fixing device | Yoichi Harayama, Keiichi Takemoto | 2020-01-14 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10593573 | Electrostatic chuck and substrate fixing device | Tatsuro Yoshida | 2020-03-17 |
| 10535545 | Substrate fixing device | Yoichi Harayama, Keiichi Takemoto | 2020-01-14 |