Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847401 | Wafer holding apparatus and baseplate structure | Syuuichi Andou, Kenji Takatsuka, Katsuhiro KOSUGA | 2020-11-24 |
| 10600669 | Substrate fixture and substrate fixing device | — | 2020-03-24 |