Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861732 | Electrostatic chuck and substrate fixing device | Tomotake Minemura, Shigeaki Suganuma | 2020-12-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861732 | Electrostatic chuck and substrate fixing device | Tomotake Minemura, Shigeaki Suganuma | 2020-12-08 |