Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607863 | Substrate processing apparatus | Takashi Ootagaki | 2020-03-31 |
| 10586727 | Suction stage, lamination device, and method for manufacturing laminated substrate | Emi Matsui, Takahiro KANAI | 2020-03-10 |