Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10773425 | Imprint template manufacturing apparatus and imprint template manufacturing method | Satoshi Nakamura, Daisuke Matsushima, Masayuki Hatano, Hiroyuki Kashiwagi | 2020-09-15 |
| 10734217 | Substrate treatment device and substrate treatment method | Masaya KAMIYA, Daisuke Matsushima, Haruka Nakano, Ivan Petrov Ganachev | 2020-08-04 |
| 10668496 | Imprint template treatment apparatus | Satoshi Nakamura, Daisuke Matsushima, Masayuki Hatano, Hiroyuki Kashiwagi | 2020-06-02 |