Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879064 | Method for manufacturing semiconductor device and film forming apparatus | Shinji Nakajima, Hirohiko Nishiki, Hirohide MIMURA, Yuhichi Saitoh, Shogo Murashige +2 more | 2020-12-29 |