MC

Menglai Chen

SC Shanghai Micro Electronics Equipment (Group) Co.: 1 patents #9 of 60Top 15%
Overall (2020): #351,605 of 565,922Top 65%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10712668 Shutter device used for exposure in lithography machine, and method for use thereof Fuping Zhang 2020-07-14