Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10773281 | Anhydrous substrate cleaning composition, substrate treating method, and substrate treating apparatus | Ki-Moon Kang, In-Il JUNG, Hae-Won Choi | 2020-09-15 |
| 10711228 | Substrate treating apparatus and substrate treating method | Mong Ryong Lee, Miyoung Jo, YeRim Yeon | 2020-07-14 |