Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854481 | Substrate processing method and substrate processing apparatus | Shigeki Tanizawa, Makoto Takaoka, Naoki SAWAZAKI, Tsuyoshi Okumura, Atsuyasu Miura | 2020-12-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854481 | Substrate processing method and substrate processing apparatus | Shigeki Tanizawa, Makoto Takaoka, Naoki SAWAZAKI, Tsuyoshi Okumura, Atsuyasu Miura | 2020-12-01 |