Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854480 | Film processing unit, substrate processing apparatus and substrate processing method | Yuji Tanaka, Masahiko Harumoto, Koji Kaneyama | 2020-12-01 |
| 10832925 | Thermal processing device, substrate processing apparatus, thermal processing method and substrate processing method | Masahiko Harumoto, Yuji Tanaka, Koji Kaneyama | 2020-11-10 |
| 10754251 | Development unit, substrate processing apparatus, development method and substrate processing method | Yuji Tanaka, Masahiko Harumoto, Koji Kaneyama | 2020-08-25 |
| 10591820 | Substrate processing apparatus and substrate processing method | Masahiko Harumoto, Yuji Tanaka, Koji Kaneyama | 2020-03-17 |
| 10539877 | Developing method | Masahiko Harumoto, Koji Kaneyama, Yuji Tanaka, Chisayo Nakayama, You Arisawa | 2020-01-21 |