Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727087 | Substrate transporting device, substrate treating apparatus, and substrate transporting method | — | 2020-07-28 |
| 10627800 | Substrate transport device, substrate processing apparatus including the substrate transport device, and substrate transport method | — | 2020-04-21 |
| 10585362 | Substrate processing apparatus, alignment device, substrate processing method and alignment method | — | 2020-03-10 |